From latta at snf.stanford.edu Tue Apr 2 02:28:21 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 2, 2002 2:28:21 PM Subject: Shutdown matrix 2002-04-02 14:28:18: Hung up. Message-ID: Can't reset, can't shut off with system on/off..... From cbaxter at snf.stanford.edu Tue Apr 2 09:02:05 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 2, 2002 9:02:05 PM Subject: Shutdown matrix 2002-04-02 14:28:18: Hung up. Message-ID: reset tool.... From bwacker at snf.stanford.edu Wed Apr 3 02:53:20 2002 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Apr 3, 2002 2:53:20 PM Subject: Problem matrix 2002-04-03 14:53:19: Matrix problems Message-ID: Cycling through single step, does not get to the right pressure, flow low From bwacker at snf.stanford.edu Wed Apr 3 02:53:52 2002 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Apr 3, 2002 2:53:52 PM Subject: Shutdown matrix 2002-04-03 14:53:52: Matrix Message-ID: From cbaxter at snf.stanford.edu Wed Apr 3 05:43:13 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 3, 2002 5:43:13 PM Subject: Shutdown matrix 2002-04-03 14:53:52: Matrix Message-ID: changed and load recipe on new strip card From cbaxter at snf.stanford.edu Wed Apr 3 05:43:18 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 3, 2002 5:43:18 PM Subject: Problem matrix 2002-04-03 14:53:19: Matrix problems Message-ID: From rohits at snf.stanford.edu Sat Apr 13 12:38:22 2002 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Apr 13, 2002 12:38:22 PM Subject: Shutdown matrix 2002-04-13 12:38:22: broken wafer inside Message-ID: Ran 8 wafers. The last wafer was unloaded in a broken state. The other piece(s) of the wafer must be inside the machine. -- Rohit From booth at snf.stanford.edu Mon Apr 15 10:43:14 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 15, 2002 10:43:14 AM Subject: Shutdown matrix 2002-04-13 12:38:22: broken wafer inside Message-ID: opened chamber & removed broken wafer. Chuck had white, granular deposit on it that probably made a wafer stick, then break. Deposit seemed to be soluable in Isopropyl. Reassembled & ran dummy wafer normally. From booth at snf.stanford.edu Mon Apr 15 10:57:51 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 15, 2002 10:57:51 AM Subject: Shutdown matrix 2002-04-15 10:57:50: pump maintenance Message-ID: From booth at snf.stanford.edu Mon Apr 15 02:28:31 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 15, 2002 2:28:31 PM Subject: Shutdown matrix 2002-04-15 10:57:50: pump maintenance Message-ID: added pump oil. From true at snf.stanford.edu Thu Apr 25 03:52:41 2002 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Apr 25, 2002 3:52:41 PM Subject: Problem matrix 2002-04-25 15:52:40: alum layer delamed Message-ID: I was trying to strip some PR off Alum and the alum delaminated from the underlying layer. There may be some of this alum film in the chamber. From cbaxter at snf.stanford.edu Thu Apr 25 06:14:53 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 25, 2002 6:14:53 PM Subject: Problem matrix 2002-04-25 15:52:40: alum layer delamed Message-ID: opened up chamber and inspect, it looks clean. bur since i had it open, i wiped down the chuck with ipa..