Shutdown matrix 2002-04-13 12:38:22: broken wafer inside

rohits at snf.stanford.edu rohits at snf.stanford.edu
Sat Apr 13 12:38:22 PDT 2002


Ran 8 wafers. The last wafer was unloaded in a broken state. The other piece(s) of the wafer must be inside the machine.
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  Rohit




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