Shutdown matrix 2002-04-13 12:38:22: broken wafer inside

booth at booth at
Mon Apr 15 10:43:14 PDT 2002

opened chamber & removed broken wafer.
Chuck had white, granular deposit on it that
probably made a wafer stick, then break.
Deposit seemed to be soluable in Isopropyl.
Reassembled & ran dummy wafer normally.

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