From jdas at snf.stanford.edu Mon Aug 5 11:40:55 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Aug 5, 2002 11:40:55 AM Subject: Shutdown matrix 2002-08-05 11:40:54: robot stuck with wafer inside Message-ID: From hphan at snf.stanford.edu Mon Aug 5 12:41:08 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 5, 2002 12:41:08 PM Subject: Shutdown matrix 2002-08-05 11:40:54: remove wafer, run testing fine. Message-ID: From pindermu at snf.stanford.edu Mon Aug 5 01:41:25 2002 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Aug 5, 2002 1:41:25 PM Subject: Problem matrix 2002-08-05 13:41:25: Wafers got stuck inside twice (no PR on the back!) Message-ID: From latta at snf.stanford.edu Mon Aug 5 03:30:23 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 5, 2002 3:30:23 PM Subject: Problem matrix 2002-08-05 13:41:25: Wafers got stuck inside twice (no PR on the back!) Message-ID: Removed and restarted machine. Second waer today; chuck dirty? From jnee at snf.stanford.edu Fri Aug 9 02:05:06 2002 From: jnee at snf.stanford.edu (jnee at snf.stanford.edu) Date: Aug 9, 2002 2:05:06 PM Subject: Shutdown matrix 2002-08-09 14:05:05: warning: chamber door not closed Message-ID: I came to the system and found this warning flashing (standby mode) warning: chamber door not closed From cbaxter at snf.stanford.edu Fri Aug 9 06:11:09 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 9, 2002 6:11:09 PM Subject: Shutdown matrix 2002-08-09 14:05:05: warning: chamber door not closed Message-ID: cleared error. tool is ok to use From wtpark at snf.stanford.edu Mon Aug 12 01:43:21 2002 From: wtpark at snf.stanford.edu (wtpark at snf.stanford.edu) Date: Aug 12, 2002 1:43:21 AM Subject: Problem matrix 2002-08-12 01:43:19: trasport error Message-ID: It stopped while loading a wafer. there is No wafer stuck inside. The machine needs reset. From wtpark at snf.stanford.edu Mon Aug 12 01:44:07 2002 From: wtpark at snf.stanford.edu (wtpark at snf.stanford.edu) Date: Aug 12, 2002 1:44:07 AM Subject: Shutdown matrix 2002-08-12 01:44:06: transport error Message-ID: I think it needs shutdown until reset. From booth at snf.stanford.edu Mon Aug 12 08:07:20 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 12, 2002 8:07:20 AM Subject: Shutdown matrix 2002-08-12 01:44:06: transport error Message-ID: From booth at snf.stanford.edu Mon Aug 12 08:08:02 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 12, 2002 8:08:02 AM Subject: Problem matrix 2002-08-12 01:43:19: trasport error Message-ID: restarted system software, sams ran one dummy wafer OK. From kjliu at snf.stanford.edu Fri Aug 16 03:39:19 2002 From: kjliu at snf.stanford.edu (kjliu at snf.stanford.edu) Date: Aug 16, 2002 3:39:19 AM Subject: Shutdown matrix 2002-08-16 03:39:18: wafer transport error Message-ID: machine displayed wafer transport error and froze with arm out and door to plasma chamber open. From booth at snf.stanford.edu Fri Aug 16 07:15:46 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 16, 2002 7:15:46 AM Subject: Shutdown matrix 2002-08-16 03:39:18: wafer transport error Message-ID: restarted system software, ran dummy OK. From gyama at snf.stanford.edu Fri Aug 16 01:41:03 2002 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Aug 16, 2002 1:41:03 PM Subject: Problem matrix 2002-08-16 13:41:02: wafer stuck loading in Message-ID: From cbaxter at snf.stanford.edu Fri Aug 16 04:46:31 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 16, 2002 4:46:31 PM Subject: Problem matrix 2002-08-16 13:41:02: wafer stuck loading in Message-ID: clear wafer and adjusted 5vdc 5.03. From seoung at snf.stanford.edu Mon Aug 19 11:02:22 2002 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Aug 19, 2002 11:02:22 PM Subject: Shutdown matrix 2002-08-19 23:02:21: Matrix problem Message-ID: When Matrix was about to start, it showed some error on the screen. Then there was a message: "To initialize the machine, press restart." Then I put the restart button. On the screen, "Power down" message was blinking. Then it just dropped my wafer in the door. So I could take it out with tweezer. I used Matrix for 40 minutes before it made an error. At that time there was no error. From booth at snf.stanford.edu Tue Aug 20 07:45:44 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 20, 2002 7:45:44 AM Subject: Shutdown matrix 2002-08-19 23:02:21: Matrix problem Message-ID: opened chamber & replaced missing wafer centering pin, ran test wafer OK. From quickwin at snf.stanford.edu Fri Aug 23 09:57:41 2002 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Aug 23, 2002 9:57:41 PM Subject: Problem matrix 2002-08-23 21:57:41: Wafer robot blade too low? It misses wafers sometimes Message-ID: Especially when there is a thick wafer, the robot misses it and report " wafer missing". From rcandler at snf.stanford.edu Sun Aug 25 04:12:59 2002 From: rcandler at snf.stanford.edu (rcandler at snf.stanford.edu) Date: Aug 25, 2002 4:12:59 PM Subject: Shutdown matrix 2002-08-25 16:12:57: Unexpected wafer on pick error Message-ID: From booth at snf.stanford.edu Mon Aug 26 07:22:16 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 26, 2002 7:22:16 AM Subject: Shutdown matrix 2002-08-25 16:12:57: Unexpected wafer on pick error Message-ID: cleared stuck wafer, verified all wafer centering pins are in place, restarted system. Put rcandlers wafer in storage dish. From booth at snf.stanford.edu Mon Aug 26 07:22:44 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 26, 2002 7:22:44 AM Subject: Problem matrix 2002-08-23 21:57:41: Wafer robot blade too low? It misses wafers sometimes Message-ID: From jnee at snf.stanford.edu Wed Aug 28 02:03:55 2002 From: jnee at snf.stanford.edu (jnee at snf.stanford.edu) Date: Aug 28, 2002 2:03:55 PM Subject: Shutdown matrix 2002-08-28 14:03:54: screen gone blank and arm stuck Message-ID: After successfully loading the recipe, I run the recipe in AUTO mode. After I press AUTO, the cassette gets ready for 1st wafer to be taken and the arm comes out to take the first wafer -- then system is stuck as the screen becomes blank and the arm stays there. The cassette does not drop down to allow the arm to grab the wafer from the cassette. All my wafers are still in load cassette (none in system as it hasn't grabbed even the 1st one yet). Please HELP!! From latta at snf.stanford.edu Wed Aug 28 02:40:49 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 28, 2002 2:40:49 PM Subject: Shutdown matrix 2002-08-28 14:03:54: screen gone blank and arm stuck Message-ID: Restatred. Seems to be ok for now.