Shutdown matrix 2002-08-05 11:40:54: robot stuck with wafer inside
jdas at snf.stanford.edu
jdas at snf.stanford.edu
Mon Aug 5 11:40:55 PDT 2002
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Problem matrix 2002-08-05 13:41:25: Wafers got stuck inside twice (no PR on the back!)
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Shutdown matrix 2002-08-05 11:40:54: remove wafer, run testing fine.
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Problem matrix 2002-08-05 13:41:25: Wafers got stuck inside twice (no PR on the back!)
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Shutdown matrix 2002-08-05 11:40:54: remove wafer, run testing fine.
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