Shutdown matrix 2002-08-16 03:39:18: wafer transport error
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri Aug 16 07:15:46 PDT 2002
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Shutdown matrix 2002-08-16 03:39:18: wafer transport error
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restarted system software, ran dummy OK.
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Shutdown matrix 2002-08-19 23:02:21: Matrix problem
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