Problem matrix 2002-08-16 13:41:02: wafer stuck loading in
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Fri Aug 16 04:46:31 PDT 2002
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Problem matrix 2002-08-16 13:41:02: wafer stuck loading in
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Shutdown matrix 2002-08-16 03:39:18: wafer transport error
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clear wafer and adjusted 5vdc 5.03.
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Problem matrix 2002-08-16 13:41:02: wafer stuck loading in
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Shutdown matrix 2002-08-16 03:39:18: wafer transport error
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