From booth at snf.stanford.edu  Mon Dec  2 08:42:33 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Dec 2, 2002 8:42:33 AM
Subject: Shutdown matrix 2002-12-02 08:42:32: software fault & broken wafer pieces
Message-ID: <mailman.194.1357938496.25810.matrix-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Mon Dec  2 02:51:54 2002
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Dec 2, 2002 2:51:54 PM
Subject: Shutdown matrix 2002-12-02 14:51:53: Mount cassette error
Message-ID: <mailman.195.1357938496.25810.matrix-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Mon Dec  2 03:07:18 2002
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Dec 2, 2002 3:07:18 PM
Subject: Shutdown matrix 2002-12-02 14:51:53: Mount cassette error
Message-ID: <mailman.196.1357938496.25810.matrix-pcs@snf.stanford.edu>

It's about the enabling, Stupid!



From latta at snf.stanford.edu  Mon Dec  2 03:07:40 2002
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Dec 2, 2002 3:07:40 PM
Subject: Shutdown matrix 2002-12-02 08:42:32: software fault & broken wafer pieces
Message-ID: <mailman.197.1357938496.25810.matrix-pcs@snf.stanford.edu>

Tested.  It works.



From latta at snf.stanford.edu  Mon Dec  2 03:07:56 2002
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Dec 2, 2002 3:07:56 PM
Subject: Problem matrix 2002-11-30 03:35:59: wafer transport error
Message-ID: <mailman.198.1357938496.25810.matrix-pcs@snf.stanford.edu>

Software blip.  Fixed



From amyers at snf.stanford.edu  Mon Dec 16 11:49:06 2002
From: amyers at snf.stanford.edu (amyers at snf.stanford.edu)
Date: Dec 16, 2002 11:49:06 AM
Subject: Shutdown matrix 2002-12-16 11:49:04: matrix asher
Message-ID: <mailman.199.1357938496.25810.matrix-pcs@snf.stanford.edu>

The tool took my wafer and ashed it.  However, when it was returning the wafer to the d`cassette it had a transport error.  



From booth at snf.stanford.edu  Mon Dec 16 12:46:14 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Dec 16, 2002 12:46:14 PM
Subject: Shutdown matrix 2002-12-16 11:49:04: matrix asher
Message-ID: <mailman.200.1357938496.25810.matrix-pcs@snf.stanford.edu>

Checked for correct pin placement - OK
REstarted system software & loaded std recipe.



From hansen at snf.stanford.edu  Wed Dec 18 01:21:19 2002
From: hansen at snf.stanford.edu (hansen at snf.stanford.edu)
Date: Dec 18, 2002 1:21:19 PM
Subject: Shutdown matrix 2002-12-18 13:21:19: Matrix not responding...wafer in machine
Message-ID: <mailman.201.1357938496.25810.matrix-pcs@snf.stanford.edu>

Matrix froze.
After leaving standby mode and loading the standard O2 program, I loaded single Matrix dummy wafer.  The arm took the wafer, but then the screen went blank and the machine did not make any pumping down noises.  There is still a matrix dummy on the arm.  I left the machine in this state.
-Sean Hansen



From cbaxter at snf.stanford.edu  Wed Dec 18 06:08:36 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Dec 18, 2002 6:08:36 PM
Subject: Shutdown matrix 2002-12-18 13:21:19: Matrix not responding...wafer in machine
Message-ID: <mailman.202.1357938496.25810.matrix-pcs@snf.stanford.edu>

interlock was tripped. power tool back up and recovere
wafer on arm