From wliu at snf.stanford.edu  Tue Jul  2 07:05:26 2002
From: wliu at snf.stanford.edu (wliu at snf.stanford.edu)
Date: Jul 2, 2002 7:05:26 PM
Subject: Problem matrix 2002-07-02 19:05:25: can't sense wafers
Message-ID: <mailman.128.1357938495.25810.matrix-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Wed Jul  3 08:59:56 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 3, 2002 8:59:56 AM
Subject: Problem matrix 2002-07-02 19:05:25: can't sense wafers
Message-ID: <mailman.129.1357938495.25810.matrix-pcs@snf.stanford.edu>

found flakes (metal?) & contamination in strip chamber.
Also, 2 ceramic wafer locating pins in hot chuck were
popped out of their holes, so wafer could not be 
correctly seated on chuck.  Put ceramic pins back
in place, vacuumed up particles, wiped O-rings w/Iso.
Ran dummy wafer normally.



From lwpan at snf.stanford.edu  Tue Jul  9 04:35:08 2002
From: lwpan at snf.stanford.edu (lwpan at snf.stanford.edu)
Date: Jul 9, 2002 4:35:08 PM
Subject: Problem matrix 2002-07-09 16:35:07: machine freezes
Message-ID: <mailman.130.1357938495.25810.matrix-pcs@snf.stanford.edu>

The machine freezes after a wafer transportation error.



From booth at snf.stanford.edu  Wed Jul 10 06:58:45 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 10, 2002 6:58:45 AM
Subject: Problem matrix 2002-07-09 16:35:07: machine freezes
Message-ID: <mailman.131.1357938495.25810.matrix-pcs@snf.stanford.edu>

restarted system software, loaded & tested 
standard recipe on test wafer - OK



From booth at snf.stanford.edu  Tue Jul 23 03:11:38 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 23, 2002 3:11:38 PM
Subject: Shutdown matrix 2002-07-20 10:28:32: robot dropped an wafer inside
Message-ID: <mailman.132.1357938495.25810.matrix-pcs@snf.stanford.edu>

replaced missing  ceramic wafer centering pin
Cycled one dummy through system - OK



From davehong at snf.stanford.edu  Thu Jul 25 08:23:05 2002
From: davehong at snf.stanford.edu (davehong at snf.stanford.edu)
Date: Jul 25, 2002 8:23:05 PM
Subject: Problem matrix 2002-07-25 20:23:04: stuck in wafer transport initializing mode
Message-ID: <mailman.133.1357938495.25810.matrix-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Jul 26 12:33:12 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 26, 2002 12:33:12 AM
Subject: Problem matrix 2002-07-25 20:23:04: stuck in wafer transport initializing mode
Message-ID: <mailman.134.1357938495.25810.matrix-pcs@snf.stanford.edu>

clear and removed wafer



From yyao at snf.stanford.edu  Sat Jul 27 10:59:11 2002
From: yyao at snf.stanford.edu (yyao at snf.stanford.edu)
Date: Jul 27, 2002 10:59:11 AM
Subject: Shutdown matrix 2002-07-27 10:59:11: sample lost inside
Message-ID: <mailman.135.1357938495.25810.matrix-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Mon Jul 29 07:56:47 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 29, 2002 7:56:47 AM
Subject: Shutdown matrix 2002-07-27 10:59:11: sample lost inside
Message-ID: <mailman.136.1357938495.25810.matrix-pcs@snf.stanford.edu>

recoved wafer, restarted system software