From josie at snf.stanford.edu  Sat Jun  1 05:18:14 2002
From: josie at snf.stanford.edu (josie at snf.stanford.edu)
Date: Jun 1, 2002 5:18:14 PM
Subject: Problem matrix 2002-06-01 17:18:13: found matrix not powered up 
Message-ID: <mailman.118.1357938495.25810.matrix-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Mon Jun  3 06:58:01 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jun 3, 2002 6:58:01 AM
Subject: Problem matrix 2002-06-01 17:18:13: found matrix not powered up 
Message-ID: <mailman.119.1357938495.25810.matrix-pcs@snf.stanford.edu>

machine was powered up this morning.
No information on who started/fixed it.
I replaced burned out bulb in system
ON button.



From jdas at snf.stanford.edu  Mon Jun 10 11:34:27 2002
From: jdas at snf.stanford.edu (jdas at snf.stanford.edu)
Date: Jun 10, 2002 11:34:27 AM
Subject: Problem matrix 2002-06-10 11:34:26: robot stuck at initializing
Message-ID: <mailman.120.1357938495.25810.matrix-pcs@snf.stanford.edu>

Robot tried to return  wafer in a slot with wafer, and stopped.
when robot tried to re-initilize it self, it froze.



From booth at snf.stanford.edu  Mon Jun 10 01:15:56 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jun 10, 2002 1:15:56 PM
Subject: Problem matrix 2002-06-10 11:34:26: robot stuck at initializing
Message-ID: <mailman.121.1357938495.25810.matrix-pcs@snf.stanford.edu>

checked for lost wafer, restarted software
system looks OK.



From booth at snf.stanford.edu  Mon Jun 17 08:49:06 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jun 17, 2002 8:49:06 AM
Subject: Shutdown matrix 2002-06-17 08:49:06: equipment vacuum down
Message-ID: <mailman.122.1357938495.25810.matrix-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Mon Jun 17 11:05:32 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jun 17, 2002 11:05:32 AM
Subject: Shutdown matrix 2002-06-17 08:49:06: equipment vacuum down
Message-ID: <mailman.123.1357938495.25810.matrix-pcs@snf.stanford.edu>

house vacuum back up.



From evelyn at snf.stanford.edu  Mon Jun 17 04:20:35 2002
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Jun 17, 2002 4:20:35 PM
Subject: Shutdown matrix 2002-06-17 16:20:34: won't reset
Message-ID: <mailman.124.1357938495.25810.matrix-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Mon Jun 17 05:16:26 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jun 17, 2002 5:16:26 PM
Subject: Shutdown matrix 2002-06-17 16:20:34: Reset system, run a process.
Message-ID: <mailman.125.1357938495.25810.matrix-pcs@snf.stanford.edu>




From quickwin at snf.stanford.edu  Sat Jun 22 06:35:00 2002
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Jun 22, 2002 6:35:00 PM
Subject: Shutdown matrix 2002-06-22 18:34:59: wafer dropped - system shutdown
Message-ID: <mailman.126.1357938495.25810.matrix-pcs@snf.stanford.edu>

Hi,
Today I enabled the system to find this warning message "dropped wafer, to resume operation, power down and retrieve wafer". I don't know who dropped the wafer or whether a wafer is really dropped.
Ben



From booth at snf.stanford.edu  Mon Jun 24 07:29:05 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jun 24, 2002 7:29:05 AM
Subject: Shutdown matrix 2002-06-22 18:34:59: wafer dropped - system shutdown
Message-ID: <mailman.127.1357938495.25810.matrix-pcs@snf.stanford.edu>

checked system & loaded recipe - OK.