From linan at snf.stanford.edu  Sat Mar  2 07:33:47 2002
From: linan at snf.stanford.edu (linan at snf.stanford.edu)
Date: Mar 2, 2002 7:33:47 PM
Subject: Problem matrix 2002-03-02 19:33:45: wafer in matrix
Message-ID: <mailman.98.1357938495.25810.matrix-pcs@snf.stanford.edu>

Matrix stoped while loading/unloading a wafer.  My wafer is inside the matrix.



From booth at snf.stanford.edu  Mon Mar  4 09:19:58 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 4, 2002 9:19:58 AM
Subject: Shutdown matrix 2002-03-04 09:19:55: Broken wafer inside etch chamber
Message-ID: <mailman.99.1357938495.25810.matrix-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Mon Mar  4 03:01:24 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 4, 2002 3:01:24 PM
Subject: Problem matrix 2002-03-02 19:33:45: wafer in matrix
Message-ID: <mailman.100.1357938495.25810.matrix-pcs@snf.stanford.edu>

cleaned up broken wafer.



From booth at snf.stanford.edu  Mon Mar  4 03:01:52 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 4, 2002 3:01:52 PM
Subject: Shutdown matrix 2002-03-04 09:19:55: Broken wafer inside etch chamber
Message-ID: <mailman.101.1357938495.25810.matrix-pcs@snf.stanford.edu>

cleaned up broken wafer.