Shutdown matrix 2002-03-04 09:19:55: Broken wafer inside etch chamber
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Mar 4 09:19:58 PST 2002
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Problem matrix 2002-03-02 19:33:45: wafer in matrix
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Shutdown matrix 2002-03-04 09:19:55: Broken wafer inside etch chamber
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