From disney at snf.stanford.edu  Thu May  9 11:33:28 2002
From: disney at snf.stanford.edu (disney at snf.stanford.edu)
Date: May 9, 2002 11:33:28 AM
Subject: Shutdown matrix 2002-05-09 11:33:26: wafer stuck inside
Message-ID: <mailman.114.1357938495.25810.matrix-pcs@snf.stanford.edu>

got "transport error"...my wafer is still inside



From booth at snf.stanford.edu  Thu May  9 12:20:31 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 9, 2002 12:20:31 PM
Subject: Shutdown matrix 2002-05-09 11:33:26: wafer stuck inside
Message-ID: <mailman.115.1357938495.25810.matrix-pcs@snf.stanford.edu>

removed wafer, restarted tool.
Everything seems normal again.
Don ran next wafer with no trouble.



From aaronp at snf.stanford.edu  Sun May 12 04:01:23 2002
From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu)
Date: May 12, 2002 4:01:23 AM
Subject: Problem matrix 2002-05-12 04:01:22: loader misaligned
Message-ID: <mailman.116.1357938495.25810.matrix-pcs@snf.stanford.edu>

the loader is nearly crunching wafers on the upper part of the caset.  use with caution on important wafers.



From booth at snf.stanford.edu  Mon May 13 07:22:35 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 13, 2002 7:22:35 AM
Subject: Problem matrix 2002-05-12 04:01:22: loader misaligned
Message-ID: <mailman.117.1357938495.25810.matrix-pcs@snf.stanford.edu>

Ran dummy wafer from both slot 1
& slot 25.  Load & unload are good.