From bwacker at snf.stanford.edu Fri Nov 1 03:25:39 2002 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Nov 1, 2002 3:25:39 PM Subject: Shutdown matrix 2002-11-01 15:25:38: Matrix problem Message-ID: My wafer was stack on the unload on the palette. I took it off but machine is not working any more. Barbara From cbaxter at snf.stanford.edu Fri Nov 1 04:18:02 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 1, 2002 4:18:02 PM Subject: Shutdown matrix 2002-11-01 15:25:38: Matrix problem Message-ID: recover system. arm was jammed on chamber door. From ychliu at snf.stanford.edu Sun Nov 3 11:41:24 2002 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Nov 3, 2002 11:41:24 AM Subject: Shutdown matrix 2002-11-03 11:41:23: Display off Message-ID: I loaded seven wafers and ran the standard program. The first three wafers went through perfectly. When it was unloading the third wafer, I went to the wbnonmetal area and checked my wafers there. When I came back, I found the screen was off. I have no idea about what happened. From hphan at snf.stanford.edu Mon Nov 4 10:11:23 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 4, 2002 10:11:23 AM Subject: Shutdown matrix 2002-11-03 11:41:23: Display is normal Message-ID: run a process and it looks good! From bchui at snf.stanford.edu Fri Nov 15 06:30:58 2002 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Nov 15, 2002 6:30:58 PM Subject: Problem matrix 2002-11-15 18:30:55: wafer transport error Message-ID: From pindermu at snf.stanford.edu Fri Nov 15 11:51:48 2002 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Nov 15, 2002 11:51:48 PM Subject: Problem matrix 2002-11-15 23:51:47: AC and RF green lights OFF Message-ID: From bchui at snf.stanford.edu Sun Nov 17 05:11:47 2002 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Nov 17, 2002 5:11:47 PM Subject: Shutdown matrix 2002-11-17 17:11:45: wafer stuck inside. Message-ID: After retrieving wafer please put it in the wafer dish provided. Thanks! Ben From hphan at snf.stanford.edu Mon Nov 18 09:44:02 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 18, 2002 9:44:02 AM Subject: Shutdown matrix 2002-11-17 17:11:45: Remove wafer and re-boot system. Message-ID: From hphan at snf.stanford.edu Mon Nov 18 09:44:20 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 18, 2002 9:44:20 AM Subject: Problem matrix 2002-11-15 23:51:47: Clear Message-ID: From hphan at snf.stanford.edu Mon Nov 18 09:44:32 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 18, 2002 9:44:32 AM Subject: Problem matrix 2002-11-15 18:30:55: Message-ID: From daesung at snf.stanford.edu Tue Nov 19 09:27:14 2002 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Nov 19, 2002 9:27:14 PM Subject: Shutdown matrix 2002-11-19 21:27:14: wafers fell down Message-ID: From cbaxter at snf.stanford.edu Tue Nov 19 10:42:05 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 19, 2002 10:42:05 PM Subject: Shutdown matrix 2002-11-19 21:27:14: wafers fell down Message-ID: recovered wafer From daesung at snf.stanford.edu Wed Nov 20 10:01:52 2002 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Nov 20, 2002 10:01:52 PM Subject: Shutdown matrix 2002-11-20 22:01:52: one wafer stuck inside the chamber Message-ID: From cbaxter at snf.stanford.edu Wed Nov 20 10:31:13 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 20, 2002 10:31:13 PM Subject: Shutdown matrix 2002-11-20 22:01:52: one wafer stuck inside the chamber Message-ID: wafer was on the transfer arm. removed wafer From mislam at snf.stanford.edu Thu Nov 21 09:24:35 2002 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Nov 21, 2002 9:24:35 AM Subject: Shutdown matrix 2002-11-21 09:24:35: Screen Blank, no power Message-ID: From vilanova at snf.stanford.edu Thu Nov 21 09:35:05 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 21, 2002 9:35:05 AM Subject: Shutdown matrix 2002-11-21 09:24:35: Screen Blank, no power Message-ID: machine seems to be ok now . From daesung at snf.stanford.edu Tue Nov 26 12:33:16 2002 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Nov 26, 2002 12:33:16 AM Subject: Shutdown matrix 2002-11-26 00:33:15: wafer loading problem Message-ID: From booth at snf.stanford.edu Tue Nov 26 06:42:43 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 26, 2002 6:42:43 AM Subject: Shutdown matrix 2002-11-26 00:33:15: wafer loading problem Message-ID: checked wafer transport, restarted tool, loaded std recipe. From rfasch at snf.stanford.edu Wed Nov 27 02:52:46 2002 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Nov 27, 2002 2:52:46 PM Subject: Shutdown matrix 2002-11-27 14:52:45: transport error Message-ID: did not grap a wafer and wrote a wafer transport error. No wafer is in the machine. From cbaxter at snf.stanford.edu Wed Nov 27 04:14:44 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 27, 2002 4:14:44 PM Subject: Shutdown matrix 2002-11-27 14:52:45: transport error Message-ID: ini`tialize transport and cleared wafer From seoung at snf.stanford.edu Sat Nov 30 03:36:00 2002 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Nov 30, 2002 3:36:00 AM Subject: Problem matrix 2002-11-30 03:35:59: wafer transport error Message-ID: At the very beginning of the process, the machine stopped. My wafer is in the chamber.