Shutdown matrix 2002-11-03 11:41:23: Display off

ychliu at snf.stanford.edu ychliu at snf.stanford.edu
Sun Nov 3 11:41:24 PST 2002


I loaded seven wafers and ran the standard program. The first three wafers went through perfectly. When it was unloading the third wafer, I went to the wbnonmetal area and checked my wafers there. When I came back, I found the screen was off. I have no idea about what happened. 




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