Shutdown matrix 2002-11-03 11:41:23: Display is normal
hphan at snf.stanford.edu
hphan at snf.stanford.edu
Mon Nov 4 10:11:23 PST 2002
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Shutdown matrix 2002-11-03 11:41:23: Display off
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Problem matrix 2002-11-15 18:30:55: wafer transport error
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run a process and it looks good!
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Shutdown matrix 2002-11-03 11:41:23: Display off
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Problem matrix 2002-11-15 18:30:55: wafer transport error
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