Problem matrix 2002-11-15 18:30:55: wafer transport error
bchui at snf.stanford.edu
bchui at snf.stanford.edu
Fri Nov 15 06:30:58 PST 2002
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Shutdown matrix 2002-11-03 11:41:23: Display is normal
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Problem matrix 2002-11-15 23:51:47: AC and RF green lights OFF
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Shutdown matrix 2002-11-03 11:41:23: Display is normal
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Problem matrix 2002-11-15 23:51:47: AC and RF green lights OFF
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