Problem matrix 2002-11-15 23:51:47: AC and RF green lights OFF
pindermu at snf.stanford.edu
pindermu at snf.stanford.edu
Fri Nov 15 11:51:48 PST 2002
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Problem matrix 2002-11-15 18:30:55: wafer transport error
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Shutdown matrix 2002-11-17 17:11:45: wafer stuck inside.
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Problem matrix 2002-11-15 18:30:55: wafer transport error
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Shutdown matrix 2002-11-17 17:11:45: wafer stuck inside.
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