Shutdown matrix 2002-11-20 22:01:52: one wafer stuck inside the chamber
daesung at snf.stanford.edu
daesung at snf.stanford.edu
Wed Nov 20 10:01:52 PST 2002
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Shutdown matrix 2002-11-19 21:27:14: wafers fell down
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Shutdown matrix 2002-11-20 22:01:52: one wafer stuck inside the chamber
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