Shutdown matrix 2002-11-21 09:24:35: Screen Blank, no power
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Thu Nov 21 09:35:05 PST 2002
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Shutdown matrix 2002-11-21 09:24:35: Screen Blank, no power
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Shutdown matrix 2002-11-26 00:33:15: wafer loading problem
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machine seems to be ok now .
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Shutdown matrix 2002-11-21 09:24:35: Screen Blank, no power
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Shutdown matrix 2002-11-26 00:33:15: wafer loading problem
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