Problem matrix 2002-11-30 03:35:59: wafer transport error

seoung at snf.stanford.edu seoung at snf.stanford.edu
Sat Nov 30 03:36:00 PST 2002

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 At the very beginning of the process, the machine stopped.
My wafer is in the chamber.

Previous message: Shutdown matrix 2002-11-27 14:52:45: transport error
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