Shutdown matrix 2002-10-05 10:02:09: Wafer Transport error

mislam at snf.stanford.edu mislam at snf.stanford.edu
Sat Oct 5 10:02:11 PDT 2002


While picking up wafer, arm got stuck and
showed a wafer transport error.  Machine prompt
to hit any key to reintialize wafer transport.
While reinitializing machine got stuck at  
"Wafer Transport Intializing" step.




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