Shutdown matrix 2002-10-05 10:02:09: Wafer Transport error
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Oct 7 07:03:59 PDT 2002
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Shutdown matrix 2002-10-05 10:02:09: Wafer Transport error
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Problem matrix 2002-10-18 13:24:32: wafer handling error
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restarted system software & loaded recipe.
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Shutdown matrix 2002-10-05 10:02:09: Wafer Transport error
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Problem matrix 2002-10-18 13:24:32: wafer handling error
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