Problem matrix 2002-10-18 13:24:32: wafer handling error

aaronp at snf.stanford.edu aaronp at snf.stanford.edu
Fri Oct 18 01:24:32 PDT 2002

Previous message: Shutdown matrix 2002-10-05 10:02:09: Wafer Transport error
Next message: Problem matrix 2002-10-18 13:24:32: wafer handling error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

wand halted half way in with wafer.  reset fixed problem.  then had plasma problem on first wafer, but next wafer ok.  problems did not repeat.

Previous message: Shutdown matrix 2002-10-05 10:02:09: Wafer Transport error
Next message: Problem matrix 2002-10-18 13:24:32: wafer handling error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the matrix-pcs mailing list