Problem matrix 2002-10-18 13:24:32: wafer handling error

aaronp at snf.stanford.edu aaronp at snf.stanford.edu
Fri Oct 18 01:24:32 PDT 2002


wand halted half way in with wafer.  reset fixed problem.  then had plasma problem on first wafer, but next wafer ok.  problems did not repeat.




More information about the matrix-pcs mailing list