Shutdown matrix 2002-10-23 22:36:39: wafer transport initializing

rfasch at rfasch at
Wed Oct 23 10:36:39 PDT 2002

after starting the program the machine did not took a wafer. the machine switched directly to this wafer initializing status.
No of my wafers is in the transportation system or in the chamber.
Rainer (rfasch)

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