Shutdown matrix 2002-10-31 14:19:22: stuck in "power down" mode

jnee at snf.stanford.edu jnee at snf.stanford.edu
Thu Oct 31 02:19:23 PST 2002


On loading wafer, load arm stopped midway and machine says need to restart.  Pressed "restart" on LCD screen, and it says "wafer sensed".  I was able to remove the wafer without incident, but the machine is still in "power down" mode where it wants to be powered down.  Nancy tried to help but machine seems stuck.




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