From latta at snf.stanford.edu Wed Sep 11 11:25:54 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 11, 2002 11:25:54 AM Subject: Shutdown matrix 2002-09-11 11:25:54: Handler error. Message-ID: From booth at snf.stanford.edu Wed Sep 11 11:44:45 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 11, 2002 11:44:45 AM Subject: Shutdown matrix 2002-09-11 11:25:54: Handler error. Message-ID: ceramic wafer locating pin was out of its hole in the chuck. Opened chamber & replaced pin. From bwacker at snf.stanford.edu Sat Sep 21 01:52:24 2002 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Sep 21, 2002 1:52:24 PM Subject: Problem matrix 2002-09-21 13:52:23: Failed on transport Message-ID: Matrix failed on transport when loading my last wafer. It went to the screen that says: "Initializing wafer transfer" and is stack there. Barbara From booth at snf.stanford.edu Mon Sep 23 07:22:30 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 23, 2002 7:22:30 AM Subject: Problem matrix 2002-09-21 13:52:23: Failed on transport Message-ID: cleared chamber fault This should have been a shutdown. From sams at snf.stanford.edu Sat Sep 28 11:02:32 2002 From: sams at snf.stanford.edu (sams at snf.stanford.edu) Date: Sep 28, 2002 11:02:32 PM Subject: Shutdown matrix 2002-09-28 23:02:31: Wafer Stuck in Chamber Message-ID: It processed 14 wafers successfully, but wafer 15 is stuck in the chamber and the display is in a state I haven't seen before. Among other things, it says "Wafer Transport ... Initializing" --Sam From booth at snf.stanford.edu Mon Sep 30 06:48:58 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 30, 2002 6:48:58 AM Subject: Shutdown matrix 2002-09-28 23:02:31: Wafer Stuck in Chamber Message-ID: restarted system software. Could not find sams wafer in the strip chamber.