Problem matrix 2002-09-21 13:52:23: Failed on transport
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Sep 23 07:22:30 PDT 2002
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Problem matrix 2002-09-21 13:52:23: Failed on transport
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Shutdown matrix 2002-09-28 23:02:31: Wafer Stuck in Chamber
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cleared chamber fault This should have been a shutdown.
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Problem matrix 2002-09-21 13:52:23: Failed on transport
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Shutdown matrix 2002-09-28 23:02:31: Wafer Stuck in Chamber
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