Shutdown matrix 2002-09-28 23:02:31: Wafer Stuck in Chamber

sams at snf.stanford.edu sams at snf.stanford.edu
Sat Sep 28 11:02:32 PDT 2002


It processed 14 wafers successfully, but wafer 15 is stuck in the chamber and the display is in a state I haven't seen before. Among other things, it says "Wafer Transport ... Initializing"
--Sam




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