Shutdown matrix 2002-09-28 23:02:31: Wafer Stuck in Chamber

sams at sams at
Sat Sep 28 11:02:32 PDT 2002

It processed 14 wafers successfully, but wafer 15 is stuck in the chamber and the display is in a state I haven't seen before. Among other things, it says "Wafer Transport ... Initializing"

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