From cad59 at snf.stanford.edu Thu Apr 10 07:14:35 2003 From: cad59 at snf.stanford.edu (cad59 at snf.stanford.edu) Date: Apr 10, 2003 7:14:35 AM Subject: Shutdown matrix 2003-04-10 07:14:34: Report Shutdown for matrix Message-ID: fed in device wafer while checking process From booth at snf.stanford.edu Thu Apr 10 07:53:25 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 10, 2003 7:53:25 AM Subject: Shutdown matrix 2003-04-10 07:14:34: Report Clear for matrix Message-ID: ceramic wafer centering pin was missing from cathode. Opened chamber & replaced missing pin. Restarted system. From jnee at snf.stanford.edu Fri Apr 11 10:50:28 2003 From: jnee at snf.stanford.edu (jnee at snf.stanford.edu) Date: Apr 11, 2003 10:50:28 AM Subject: Shutdown matrix 2003-04-11 10:50:27: Report Shutdown for matrix Message-ID: Screen blanked out during etch(PR strip) of 3rd wafer of 4. Wafer is stuck in system. From booth at snf.stanford.edu Fri Apr 11 12:17:20 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 11, 2003 12:17:20 PM Subject: Shutdown matrix 2003-04-11 10:50:27: Report Clear for matrix Message-ID: removed Jocelyns wafer checked ceramic pins in chamber - OK restarted system loaded std recipe From pindermu at snf.stanford.edu Mon Apr 14 09:22:59 2003 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Apr 14, 2003 9:22:59 PM Subject: Shutdown matrix 2003-04-14 21:22:58: Report Shutdown for matrix Message-ID: My last wafer got stuck inside Pierre From booth at snf.stanford.edu Tue Apr 15 07:05:38 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 15, 2003 7:05:38 AM Subject: Shutdown matrix 2003-04-14 21:22:58: Report Clear for matrix Message-ID: removed Pierres wafer checked wafer centering pins - OK reloaded std recipe. From enwang at snf.stanford.edu Sat Apr 19 03:15:03 2003 From: enwang at snf.stanford.edu (enwang at snf.stanford.edu) Date: Apr 19, 2003 3:15:03 PM Subject: Shutdown matrix 2003-04-19 15:15:01: Report Shutdown for matrix Message-ID: transport error: indexer receive. dummy wafer inside From booth at snf.stanford.edu Mon Apr 21 07:18:44 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 21, 2003 7:18:44 AM Subject: Shutdown matrix 2003-04-19 15:15:01: Report Clear for matrix Message-ID: removed filthy wafer from Matrix, wafer had lots of greasy fingerprints on it! Replaced ceramic wafer centering pin. Restarted Matrix & loaded std recipe. From sigari at snf.stanford.edu Wed Apr 23 08:04:44 2003 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Apr 23, 2003 8:04:44 AM Subject: Shutdown matrix 2003-04-23 08:04:44: Report Shutdown for matrix Message-ID: the arm movement failure happened during unloading one wafer. The error message given by system: index error. The arm is out. From booth at snf.stanford.edu Wed Apr 23 09:19:35 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 23, 2003 9:19:35 AM Subject: Shutdown matrix 2003-04-23 08:04:44: Report Clear for matrix Message-ID: checked wafer pins - OK restarted system software. From gyama at snf.stanford.edu Wed Apr 30 01:57:10 2003 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Apr 30, 2003 1:57:10 PM Subject: Shutdown matrix 2003-04-30 13:56:59: Report Shutdown for matrix Message-ID: 1 wafer stuck 1/2 way inside cahmber, display screen blank From booth at snf.stanford.edu Wed Apr 30 03:14:15 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 30, 2003 3:14:15 PM Subject: Shutdown matrix 2003-04-30 13:56:59: Report Clear for matrix Message-ID: transport froze with Garys wafer on the blade. Removed wafer, replaced ceramic wafer centering pin on platen, restarted system, loaded std strip recipe.