From bwacker at snf.stanford.edu  Mon Aug 11 07:06:05 2003
From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu)
Date: Aug 11, 2003 7:06:05 PM
Subject: Shutdown matrix 2003-08-11 19:06:01: Report Shutdown for matrix
Message-ID: <mailman.294.1357938496.25810.matrix-pcs@snf.stanford.edu>

First there was a transport error and then screen went blank.



From booth at snf.stanford.edu  Tue Aug 12 06:43:09 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Aug 12, 2003 6:43:09 AM
Subject: Shutdown matrix 2003-08-11 19:06:01: Report Clear for matrix
Message-ID: <mailman.295.1357938496.25810.matrix-pcs@snf.stanford.edu>

restarted system.



From tkato at snf.stanford.edu  Fri Aug 15 08:02:52 2003
From: tkato at snf.stanford.edu (tkato at snf.stanford.edu)
Date: Aug 15, 2003 8:02:52 PM
Subject: Problem matrix 2003-08-15 20:02:52: robot arm didn't work
Message-ID: <mailman.296.1357938496.25810.matrix-pcs@snf.stanford.edu>

the robot arm didn't grab the center of wafer
and didn't go into the machine.
there was alarm, and I pushed the restart soft button
on the screen.



From cbaxter at snf.stanford.edu  Mon Aug 18 07:53:32 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 18, 2003 7:53:32 AM
Subject: Problem matrix 2003-08-15 20:02:52: Report Clear for matrix
Message-ID: <mailman.297.1357938496.25810.matrix-pcs@snf.stanford.edu>

set arm home position and center to cassette pick up.
cycled 3 dummy wafers with out a problem.