From booth at snf.stanford.edu Mon Dec 1 07:16:15 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mon, 1 Dec 2003 07:16:15 -0800 Subject: Comment matrix 2003-11-29 17:22:53: Worked fine today Message-ID: OK today also. From booth at snf.stanford.edu Mon Dec 1 07:16:30 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mon, 1 Dec 2003 07:16:30 -0800 Subject: Problem matrix 2003-11-28 13:37:17: Wafertransport system failed Message-ID: Restarted system firmware. From jnee at snf.stanford.edu Wed Dec 3 12:57:53 2003 From: jnee at snf.stanford.edu (jnee at snf.stanford.edu) Date: Wed, 3 Dec 2003 12:57:53 -0800 Subject: Shutdown matrix 2003-12-03 12:57:52: Transport Error: Indexer receive Message-ID: It won't unload my wafer because it thinks the Cassette is not mounted though it is. It flashes "MOUNT CASSETTE" and continues to beep. My wafer still inside, waiting to be unloaded. From hphan at snf.stanford.edu Wed Dec 3 13:30:08 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Wed, 3 Dec 2003 13:30:08 -0800 Subject: Shutdown matrix 2003-12-03 12:57:52: Transport Error: Indexer receive Message-ID: From jnee at snf.stanford.edu Fri Dec 12 15:23:00 2003 From: jnee at snf.stanford.edu (jnee at snf.stanford.edu) Date: Fri, 12 Dec 2003 15:23:00 -0800 Subject: Shutdown matrix 2003-12-12 15:23:00: Wafer transport - extend fault Message-ID: Etched 3 wafers using auto okay. Then homed and put in 1 wafer and run using single. Arm came out, took the wafer and before it got back in it shuddered and stuck with "Wafer transport - extend fault". After about 10 seconds it asked "Do you want to reinitialize" with a "reinitialize" displayed above one of the white buttons. I pressed the button and then decided to grab my wafer since it was free before it reinitialized. Then the screen shows it checking everything, saying everything is okay, but now that it's completed it won't go back to normal operating screen. From cbaxter at snf.stanford.edu Fri Dec 12 18:44:29 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 12 Dec 2003 18:44:29 -0800 Subject: Shutdown matrix 2003-12-12 15:23:00: Wafer transport - extend fault Message-ID: reset system From booth at snf.stanford.edu Mon Dec 15 06:50:03 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mon, 15 Dec 2003 06:50:03 -0800 Subject: Shutdown matrix 2003-12-15 06:50:02: Shutdown for pump maintenance Message-ID: From booth at snf.stanford.edu Mon Dec 15 08:09:35 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mon, 15 Dec 2003 08:09:35 -0800 Subject: Shutdown matrix 2003-12-15 06:50:02: Shutdown for pump maintenance Message-ID: From sigari at snf.stanford.edu Tue Dec 16 12:04:59 2003 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Tue, 16 Dec 2003 12:04:59 -0800 Subject: Shutdown matrix 2003-12-16 12:04:59: system locked Message-ID: After unloading wafers it went for intializing and is locked in that stage. Ther is no wafer in the system From booth at snf.stanford.edu Tue Dec 16 12:55:08 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Tue, 16 Dec 2003 12:55:08 -0800 Subject: Shutdown matrix 2003-12-16 12:04:59: system locked Message-ID: restarted system From davehong at snf.stanford.edu Tue Dec 16 20:59:24 2003 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Tue, 16 Dec 2003 20:59:24 -0800 Subject: Problem matrix 2003-12-16 20:59:23: equipment display problem Message-ID: my wafers were processed but now there is nothing showing on the display. From cbaxter at snf.stanford.edu Tue Dec 16 22:02:56 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 16 Dec 2003 22:02:56 -0800 Subject: Problem matrix 2003-12-16 20:59:23: equipment display problem Message-ID: adjusted 5vdc and monitor voltage. 5vdc is holding fine @5vdc +/-.05. From rcrane at snf.stanford.edu Fri Dec 19 11:29:19 2003 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Fri, 19 Dec 2003 11:29:19 -0800 Subject: Shutdown matrix 2003-12-19 11:29:19: Holiday Shutdown Message-ID: