From kailash at snf.stanford.edu  Tue Feb 18 10:24:59 2003
From: kailash at snf.stanford.edu (kailash at snf.stanford.edu)
Date: Feb 18, 2003 10:24:59 AM
Subject: Shutdown matrix 2003-02-18 10:24:58: Wafer stuck
Message-ID: <mailman.213.1357938496.25810.matrix-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Tue Feb 18 10:33:35 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Feb 18, 2003 10:33:35 AM
Subject: Shutdown matrix 2003-02-18 10:24:58: Wafer stuck
Message-ID: <mailman.214.1357938496.25810.matrix-pcs@snf.stanford.edu>

removed stuck wafer & reinitialized system software.



From yyao at snf.stanford.edu  Tue Feb 18 02:11:00 2003
From: yyao at snf.stanford.edu (yyao at snf.stanford.edu)
Date: Feb 18, 2003 2:11:00 PM
Subject: Problem matrix 2003-02-18 14:11:00: unknown status
Message-ID: <mailman.215.1357938496.25810.matrix-pcs@snf.stanford.edu>




From sjain at snf.stanford.edu  Tue Feb 18 02:39:12 2003
From: sjain at snf.stanford.edu (sjain at snf.stanford.edu)
Date: Feb 18, 2003 2:39:12 PM
Subject: Problem matrix 2003-02-18 14:39:11: rf and ac lights not on
Message-ID: <mailman.216.1357938496.25810.matrix-pcs@snf.stanford.edu>

rf and ac light are not on



From booth at snf.stanford.edu  Tue Feb 18 02:43:21 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Feb 18, 2003 2:43:21 PM
Subject: Problem matrix 2003-02-18 14:39:11: rf and ac lights not on
Message-ID: <mailman.217.1357938496.25810.matrix-pcs@snf.stanford.edu>

another strange symptom - maybe power supply
again?  



From booth at snf.stanford.edu  Tue Feb 18 02:44:19 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Feb 18, 2003 2:44:19 PM
Subject: Problem matrix 2003-02-18 14:11:00: unknown status
Message-ID: <mailman.218.1357938496.25810.matrix-pcs@snf.stanford.edu>

what does this subject line mean?



From cbaxter at snf.stanford.edu  Tue Feb 18 08:20:26 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Feb 18, 2003 8:20:26 PM
Subject: Shutdown matrix 2003-02-18 20:20:23: working on lock up problem
Message-ID: <mailman.219.1357938496.25810.matrix-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Tue Feb 18 09:51:29 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Feb 18, 2003 9:51:29 PM
Subject: Shutdown matrix 2003-02-18 20:20:23: working on lock up problem
Message-ID: <mailman.220.1357938496.25810.matrix-pcs@snf.stanford.edu>

adjusted 5vdc and +/-15vdc



From hphan at snf.stanford.edu  Thu Feb 20 16:55:48 2003
From: hphan at snf.stanford.edu (Henry Phan)
Date: Thu, 20 Feb 2003 16:55:48 -0800
Subject: Testing
Message-ID: <3E557914.852068B3@snf.stanford.edu>



--
Henry
_ _ _ _
Henry Q. Phan
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA  94305
(650)725-3659
hphan at snf.stanford.edu




From bwacker at snf.stanford.edu  Fri Feb 28 12:44:25 2003
From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu)
Date: Feb 28, 2003 12:44:25 PM
Subject: Shutdown matrix 2003-02-28 12:44:21: Report Shutdown for matrix
Message-ID: <mailman.221.1357938496.25810.matrix-pcs@snf.stanford.edu>

The transport blade is stack out inside the wafers boat between my wafers. I cannot get my wafers out.
Please help!
Barbara



From booth at snf.stanford.edu  Fri Feb 28 01:33:21 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Feb 28, 2003 1:33:21 PM
Subject: Shutdown matrix 2003-02-28 12:44:21: Report Clear for matrix
Message-ID: <mailman.222.1357938496.25810.matrix-pcs@snf.stanford.edu>

system froze, with transport arm in cassette.
cleared arm from cassette so Barbara could get her
wafers out, & restarted tool.
Barbara ran two dummy wafers OK.