From harshal at snf.stanford.edu Wed Jul 2 07:06:07 2003 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Jul 2, 2003 7:06:07 PM Subject: Problem matrix 2003-07-02 19:06:07: Report Problem for matrix Message-ID: wafer transport error. gave a message to press restart. after pressing restart, the loading arm stopped.machine reads wafer transport initializing.. From harshal at snf.stanford.edu Wed Jul 2 07:40:10 2003 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Jul 2, 2003 7:40:10 PM Subject: Comment matrix 2003-07-02 19:40:10: Report Comment for matrix Message-ID: wafer transport initialized after a few minutes. disregard the earlier problem report. system on standby and ready for use. From zappe at snf.stanford.edu Wed Jul 2 10:14:42 2003 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Jul 2, 2003 10:14:42 PM Subject: Shutdown matrix 2003-07-02 22:14:42: Report Shutdown for matrix Message-ID: Machine got finally completely messed up. In automatic mode it wouldn't recognize any wafer, would finally stop. The screen went black. From booth at snf.stanford.edu Thu Jul 3 07:18:16 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 3, 2003 7:18:16 AM Subject: Problem matrix 2003-07-02 19:06:07: Report Clear for matrix Message-ID: removed broken wafer pieces from strip chamber. From booth at snf.stanford.edu Thu Jul 3 07:18:47 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 3, 2003 7:18:47 AM Subject: Shutdown matrix 2003-07-02 22:14:42: Report Clear for matrix Message-ID: removed broken wafer pieces from strip chamber. From erics at snf.stanford.edu Tue Jul 15 06:38:23 2003 From: erics at snf.stanford.edu (erics at snf.stanford.edu) Date: Jul 15, 2003 6:38:23 PM Subject: Shutdown matrix 2003-07-15 18:38:20: Report Shutdown for matrix Message-ID: hello, I was running the matrix and the screen stopped working. eric 408-605-4439 From booth at snf.stanford.edu Wed Jul 16 07:41:53 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 16, 2003 7:41:53 AM Subject: Shutdown matrix 2003-07-15 18:38:20: Report Clear for matrix Message-ID: machine seems normal this morning. No action needed. From mattlin at snf.stanford.edu Wed Jul 16 03:29:59 2003 From: mattlin at snf.stanford.edu (mattlin at snf.stanford.edu) Date: Jul 16, 2003 3:29:59 PM Subject: Problem matrix 2003-07-16 15:29:58: Report Problem for matrix Message-ID: my wafer was broken into pieces when it was unloaded from the matrix. From cbaxter at snf.stanford.edu Wed Jul 16 05:53:20 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 16, 2003 5:53:20 PM Subject: Problem matrix 2003-07-16 15:29:58: Report Clear for matrix Message-ID: opened up chamber and a`vacuum out pieces of wafers chips. inserted back the ceramic pin. From qwang at snf.stanford.edu Wed Jul 16 06:17:28 2003 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Jul 16, 2003 6:17:28 PM Subject: Problem matrix 2003-07-16 18:17:26: wafer transport not work Message-ID: From qwang at snf.stanford.edu Wed Jul 16 06:21:20 2003 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Jul 16, 2003 6:21:20 PM Subject: Shutdown matrix 2003-07-16 18:21:20: Power lost Message-ID: From booth at snf.stanford.edu Thu Jul 17 07:03:44 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 17, 2003 7:03:44 AM Subject: Problem matrix 2003-07-16 18:17:26: Report Clear for matrix Message-ID: changed to shutdown From booth at snf.stanford.edu Thu Jul 17 07:04:10 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 17, 2003 7:04:10 AM Subject: Shutdown matrix 2003-07-16 18:21:20: Report Clear for matrix Message-ID: chedked chamber & restarted system formware. From mattlin at snf.stanford.edu Sun Jul 20 09:37:11 2003 From: mattlin at snf.stanford.edu (mattlin at snf.stanford.edu) Date: Jul 20, 2003 9:37:11 PM Subject: Problem matrix 2003-07-20 21:37:10: Report Problem for matrix Message-ID: screen reads: "no wafer sensed in chamber. to resume operation power down and retrieve wafer" i'd like my wafer back if possible. From booth at snf.stanford.edu Mon Jul 21 07:28:17 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 21, 2003 7:28:17 AM Subject: Problem matrix 2003-07-20 21:37:10: Report Clear for matrix Message-ID: yellow process wafer had been bonded to carrier wafer. Device wafer delaminated from carrier and broke apart in strip chamber. Opened chamber & cleaned up broken pieces. From mislam at snf.stanford.edu Wed Jul 30 11:39:43 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Jul 30, 2003 11:39:43 AM Subject: Problem matrix 2003-07-30 11:39:37: No display, screen blank Message-ID: After my wafers were done, screen went blank. Machine won't run. From cbaxter at snf.stanford.edu Wed Jul 30 12:14:13 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 30, 2003 12:14:13 PM Subject: Problem matrix 2003-07-30 11:39:37: Report Clear for matrix Message-ID: reset tool and screen is back on