Problem matrix 2003-07-20 21:37:10: Report Clear for matrix

booth at snf.stanford.edu booth at snf.stanford.edu
Mon Jul 21 07:28:17 PDT 2003


yellow process wafer had been bonded to carrier
wafer.  Device wafer delaminated from carrier and
broke apart in strip chamber.  Opened chamber
& cleaned up broken pieces.




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