From gyama at snf.stanford.edu Sat Jun 7 02:34:55 2003 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Jun 7, 2003 2:34:55 PM Subject: Shutdown matrix 2003-06-07 14:34:55: Report Shutdown for matrix Message-ID: 1/2 wafer came out & 1/2 wafer stuck inside machine From booth at snf.stanford.edu Mon Jun 9 08:55:19 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 9, 2003 8:55:19 AM Subject: Shutdown matrix 2003-06-07 14:34:55: Report Clear for matrix Message-ID: cleaned broken wafer pieces from strip chamber. There were only about 4 1 cm pieces in the chamber. Someone had removed the top cover screws - maybe they took the missing part of the wafer out??? From hanjun at snf.stanford.edu Tue Jun 10 11:57:15 2003 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Jun 10, 2003 11:57:15 AM Subject: Shutdown matrix 2003-06-10 11:57:15: Report Shutdown for matrix Message-ID: power turned off by itself From hphan at snf.stanford.edu Tue Jun 10 03:39:30 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jun 10, 2003 3:39:30 PM Subject: Shutdown matrix 2003-06-10 11:57:15: Report Clear for matrix Message-ID: Resest System run a test. From booth at snf.stanford.edu Mon Jun 23 08:07:51 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 23, 2003 8:07:51 AM Subject: Shutdown matrix 2003-06-23 08:07:50: Report Shutdown for matrix Message-ID: pumping fault From booth at snf.stanford.edu Tue Jun 24 03:01:31 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 24, 2003 3:01:31 PM Subject: Shutdown matrix 2003-06-23 08:07:50: Report Clear for matrix Message-ID: replaced 20 amp breaker From crichter at snf.stanford.edu Tue Jun 24 06:57:24 2003 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Jun 24, 2003 6:57:24 PM Subject: Problem matrix 2003-06-24 18:57:23: green status but a DO NOT USE sign ? Message-ID: light is on green but there is a DO NOT USE sign on the matrix. From cbaxter at snf.stanford.edu Tue Jun 24 10:26:55 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 24, 2003 10:26:55 PM Subject: Problem matrix 2003-06-24 18:57:23: Report Clear for matrix Message-ID: system is ok to use From harshal at snf.stanford.edu Wed Jun 25 10:41:58 2003 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Jun 25, 2003 10:41:58 AM Subject: Shutdown matrix 2003-06-25 10:41:57: Report Shutdown for matrix Message-ID: transport error From booth at snf.stanford.edu Wed Jun 25 11:00:04 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 25, 2003 11:00:04 AM Subject: Shutdown matrix 2003-06-25 10:41:57: Report Clear for matrix Message-ID: replaced ceramic wafer centering pin that was out of its hole. From amyers at snf.stanford.edu Wed Jun 25 01:34:01 2003 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Jun 25, 2003 1:34:01 PM Subject: Shutdown matrix 2003-06-25 13:34:01: Report Shutdown for matrix Message-ID: The tool reported a wafer extend error while taking the wafer into the chamber. It is requesting a power shutdown. My wafer was sticking halfway out of the tool and was not vacuum attached to the wafer wand so I removed it. From booth at snf.stanford.edu Wed Jun 25 02:23:57 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 25, 2003 2:23:57 PM Subject: Shutdown matrix 2003-06-25 13:34:01: Report Clear for matrix Message-ID: restarted system software.