From beckwith at snf.stanford.edu  Mon Mar  3 05:05:42 2003
From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu)
Date: Mar 3, 2003 5:05:42 PM
Subject: Problem matrix 2003-03-03 17:05:41: WAFER STUCK ON ARM
Message-ID: <mailman.223.1357938496.25810.matrix-pcs@snf.stanford.edu>

It tried to load the dummy wafer and got stuck!



From cbaxter at snf.stanford.edu  Mon Mar  3 06:14:47 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 3, 2003 6:14:47 PM
Subject: Problem matrix 2003-03-03 17:05:41: Report Clear for matrix
Message-ID: <mailman.224.1357938496.25810.matrix-pcs@snf.stanford.edu>

retreive wafer from arm and reset system



From quickwin at snf.stanford.edu  Mon Mar 17 08:25:13 2003
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Mar 17, 2003 8:25:13 PM
Subject: Shutdown matrix 2003-03-17 20:25:12: Report Shutdown for matrix
Message-ID: <mailman.225.1357938496.25810.matrix-pcs@snf.stanford.edu>

System initialization error. 



From cbaxter at snf.stanford.edu  Mon Mar 17 08:54:36 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 17, 2003 8:54:36 PM
Subject: Shutdown matrix 2003-03-17 20:25:12: Report Clear for matrix
Message-ID: <mailman.226.1357938496.25810.matrix-pcs@snf.stanford.edu>

reboot system



From bwacker at snf.stanford.edu  Wed Mar 19 02:06:06 2003
From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu)
Date: Mar 19, 2003 2:06:06 PM
Subject: Shutdown matrix 2003-03-19 14:06:06: Report Shutdown for matrix
Message-ID: <mailman.227.1357938496.25810.matrix-pcs@snf.stanford.edu>

After loading my wafer the screen went black and matrix stopped processing



From latta at snf.stanford.edu  Wed Mar 19 02:13:17 2003
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Mar 19, 2003 2:13:17 PM
Subject: Shutdown matrix 2003-03-19 14:06:06: Report Clear for matrix
Message-ID: <mailman.228.1357938496.25810.matrix-pcs@snf.stanford.edu>

Ran test run after Len replaced 2 fallen over pins..



From evelyn at snf.stanford.edu  Thu Mar 20 01:04:56 2003
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Mar 20, 2003 1:04:56 PM
Subject: Shutdown matrix 2003-03-20 13:04:56: Report Shutdown for matrix
Message-ID: <mailman.229.1357938496.25810.matrix-pcs@snf.stanford.edu>

"warning chamber door not closed"



From booth at snf.stanford.edu  Thu Mar 20 01:09:13 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 20, 2003 1:09:13 PM
Subject: Shutdown matrix 2003-03-20 13:04:56: Report Clear for matrix
Message-ID: <mailman.230.1357938496.25810.matrix-pcs@snf.stanford.edu>

restarted system software



From evelyn at snf.stanford.edu  Thu Mar 20 02:35:17 2003
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Mar 20, 2003 2:35:17 PM
Subject: Shutdown matrix 2003-03-20 14:35:17: Report Shutdown for matrix
Message-ID: <mailman.231.1357938496.25810.matrix-pcs@snf.stanford.edu>

door won't close



From evelyn at snf.stanford.edu  Thu Mar 20 02:35:38 2003
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Mar 20, 2003 2:35:38 PM
Subject: Shutdown matrix 2003-03-20 14:35:37: Report Shutdown for matrix
Message-ID: <mailman.232.1357938496.25810.matrix-pcs@snf.stanford.edu>

door won't close



From booth at snf.stanford.edu  Fri Mar 21 08:05:12 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 21, 2003 8:05:12 AM
Subject: Shutdown matrix 2003-03-20 14:35:37: Report Clear for matrix
Message-ID: <mailman.233.1357938496.25810.matrix-pcs@snf.stanford.edu>

duplicate Shutdown mesage for matrix.



From booth at snf.stanford.edu  Fri Mar 21 08:05:35 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 21, 2003 8:05:35 AM
Subject: Shutdown matrix 2003-03-20 14:35:17: Report Clear for matrix
Message-ID: <mailman.234.1357938496.25810.matrix-pcs@snf.stanford.edu>

Checked DC power supply drawer.



From mislam at snf.stanford.edu  Fri Mar 21 09:48:58 2003
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Mar 21, 2003 9:48:58 AM
Subject: Shutdown matrix 2003-03-21 09:48:57: Report Shutdown for matrix
Message-ID: <mailman.235.1357938496.25810.matrix-pcs@snf.stanford.edu>

Wafer stuck on arm, cann't retreive.



From booth at snf.stanford.edu  Mon Mar 24 02:32:15 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 24, 2003 2:32:15 PM
Subject: Shutdown matrix 2003-03-21 09:48:57: Report Clear for matrix
Message-ID: <mailman.236.1357938496.25810.matrix-pcs@snf.stanford.edu>

adjusted Robot calibrations.



From booth at snf.stanford.edu  Fri Mar 28 06:06:59 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 28, 2003 6:06:59 AM
Subject: Shutdown matrix 2003-03-28 06:06:59: Report Shutdown for matrix
Message-ID: <mailman.237.1357938496.25810.matrix-pcs@snf.stanford.edu>

preventative maintenance in progress.



From booth at snf.stanford.edu  Fri Mar 28 10:13:37 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 28, 2003 10:13:37 AM
Subject: Shutdown matrix 2003-03-28 06:06:59: Report Clear for matrix
Message-ID: <mailman.238.1357938496.25810.matrix-pcs@snf.stanford.edu>

Removed DC power supply module.
Moved & remounted components to uncover cooling
air intake slots in bottom of drawer.
Installed muffin fan in cover to improve air exhaust.
Added fuse for fan.



From amyers at snf.stanford.edu  Sat Mar 29 01:38:21 2003
From: amyers at snf.stanford.edu (amyers at snf.stanford.edu)
Date: Mar 29, 2003 1:38:21 PM
Subject: Shutdown matrix 2003-03-29 13:38:18: Report Shutdown for matrix
Message-ID: <mailman.239.1357938496.25810.matrix-pcs@snf.stanford.edu>

Chamber not pumping down



From booth at snf.stanford.edu  Mon Mar 31 02:03:48 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 31, 2003 2:03:48 PM
Subject: Shutdown matrix 2003-03-29 13:38:18: Report Clear for matrix
Message-ID: <mailman.240.1357938496.25810.matrix-pcs@snf.stanford.edu>

reinstalled O-ring, put oil back in pump crankcase.