Problem matrix 2003-03-03 17:05:41: Report Clear for matrix
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Mar 3 06:14:47 PST 2003
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Problem matrix 2003-03-03 17:05:41: WAFER STUCK ON ARM
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retreive wafer from arm and reset system
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Problem matrix 2003-03-03 17:05:41: WAFER STUCK ON ARM
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Shutdown matrix 2003-03-17 20:25:12: Report Shutdown for matrix
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