From ycfu at snf.stanford.edu Fri May 9 04:44:03 2003 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: May 9, 2003 4:44:03 AM Subject: Shutdown matrix 2003-05-09 04:44:02: Report Shutdown for matrix Message-ID: It shows "transaport error: Indexer receive mount cassette" From hphan at snf.stanford.edu Fri May 9 09:49:18 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 9, 2003 9:49:18 AM Subject: Shutdown matrix 2003-05-09 04:44:02: Report Clear for matrix Message-ID: Removed wafer and reset system. From harshal at snf.stanford.edu Fri May 9 06:19:00 2003 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: May 9, 2003 6:19:00 PM Subject: Problem matrix 2003-05-09 18:18:59: Transport error observed. Message-ID: the loading arm did not transport the wafer back to the cassette. From cbaxter at snf.stanford.edu Fri May 9 10:40:06 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 9, 2003 10:40:06 PM Subject: Problem matrix 2003-05-09 18:18:59: Report Clear for matrix Message-ID: reset system From holdenli at snf.stanford.edu Sun May 11 06:44:54 2003 From: holdenli at snf.stanford.edu (holdenli at snf.stanford.edu) Date: May 11, 2003 6:44:54 PM Subject: Problem matrix 2003-05-11 18:44:54: Wafer Transport Arm doesn't move Message-ID: The wafer transport arm doesn't repond. From booth at snf.stanford.edu Mon May 12 07:53:25 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 12, 2003 7:53:25 AM Subject: Problem matrix 2003-05-11 18:44:54: Report Clear for matrix Message-ID: replaced wafer centering pin & restarted system. From holdenli at snf.stanford.edu Sun May 18 05:44:30 2003 From: holdenli at snf.stanford.edu (holdenli at snf.stanford.edu) Date: May 18, 2003 5:44:30 PM Subject: Problem matrix 2003-05-18 17:44:29: Error Message - Chamber Door Not Closed Message-ID: Wafer delivery system stopped midway & error message was shown after run. Had to retrieve wafer by tweezer. From booth at snf.stanford.edu Mon May 19 08:03:17 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 19, 2003 8:03:17 AM Subject: Problem matrix 2003-05-18 17:44:29: Report Clear for matrix Message-ID: replaced ceramic wafer centering pin, vacuumed up broken wafer pieces, restarted system - looks OK. From davehong at snf.stanford.edu Mon May 19 06:32:47 2003 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: May 19, 2003 6:32:47 PM Subject: Shutdown matrix 2003-05-19 18:32:45: Report Shutdown for matrix Message-ID: lost vacuum during transport, my wafer was dropped. From cbaxter at snf.stanford.edu Mon May 19 09:14:23 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 19, 2003 9:14:23 PM Subject: Shutdown matrix 2003-05-19 18:32:45: Report Clear for matrix Message-ID: recover wafer inside the tool. cycled system can't duplicate error From davehong at snf.stanford.edu Tue May 27 02:52:04 2003 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: May 27, 2003 2:52:04 PM Subject: Shutdown matrix 2003-05-27 14:52:04: Report Shutdown for matrix Message-ID: wafer stuck in chamber after process From booth at snf.stanford.edu Tue May 27 04:46:07 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 27, 2003 4:46:07 PM Subject: Shutdown matrix 2003-05-27 14:52:04: Report Clear for matrix Message-ID: had to open chambe to replace wafer centering pin. Restarted system software & reloaded default recipe.