Problem matrix 2003-11-28 13:37:17: Wafertransport system failed

kailash at snf.stanford.edu kailash at snf.stanford.edu
Fri Nov 28 13:37:18 PST 2003

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wafer transport system failed when loading wafer. Pressed restart (when asked to) and system failed to reinitialize the wafertransport system. System currently unusable.

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