From tkato at snf.stanford.edu Mon Oct 13 11:20:17 2003 From: tkato at snf.stanford.edu (tkato at snf.stanford.edu) Date: Oct 13, 2003 11:20:17 AM Subject: Shutdown matrix 2003-10-13 11:20:16: Report Shutdown for matrix Message-ID: robot arm wasn't able to transfer wafer to chamber From booth at snf.stanford.edu Mon Oct 13 11:25:30 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 13, 2003 11:25:30 AM Subject: Shutdown matrix 2003-10-13 11:20:16: Report Clear for matrix Message-ID: restarted machine, reloaded recipe, tested wafer loading - OK. From quickwin at snf.stanford.edu Tue Oct 14 02:42:15 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Oct 14, 2003 2:42:15 PM Subject: Shutdown matrix 2003-10-14 14:42:14: Report Shutdown for matrix Message-ID: Error "over-extended arm". From booth at snf.stanford.edu Tue Oct 14 02:55:26 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 14, 2003 2:55:26 PM Subject: Shutdown matrix 2003-10-14 14:42:14: Report Clear for matrix Message-ID: had to restart tool, & load std recipe From kcohn at snf.stanford.edu Fri Oct 17 02:22:17 2003 From: kcohn at snf.stanford.edu (kcohn at snf.stanford.edu) Date: Oct 17, 2003 2:22:17 PM Subject: Shutdown matrix 2003-10-17 14:22:15: Report Shutdown for matrix Message-ID: System fails to pump down. From cbaxter at snf.stanford.edu Fri Oct 17 07:20:31 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Oct 17, 2003 7:20:31 PM Subject: Shutdown matrix 2003-10-17 14:22:15: Report Clear for matrix Message-ID: missing 24ac on the pressure switch. changed blown fuse on tool distribution box