From gyama at snf.stanford.edu Thu Sep 4 11:17:42 2003 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sep 4, 2003 11:17:42 AM Subject: Problem matrix 2003-09-04 11:17:42: Report Problem for matrix Message-ID: 1 wafer stuck 1/2 way into chamber From booth at snf.stanford.edu Thu Sep 4 11:28:33 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 4, 2003 11:28:33 AM Subject: Problem matrix 2003-09-04 11:17:42: Report Clear for matrix Message-ID: recovered Garys wafer, checked pins in strip chamber - OK. Restarted system software. From crichter at snf.stanford.edu Thu Sep 11 05:32:20 2003 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sep 11, 2003 5:32:20 PM Subject: Problem matrix 2003-09-11 17:32:15: display console went blank Message-ID: From cbaxter at snf.stanford.edu Thu Sep 11 08:51:52 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 11, 2003 8:51:52 PM Subject: Problem matrix 2003-09-11 17:32:15: Report Clear for matrix Message-ID: reboot the system screen is back on From gyama at snf.stanford.edu Thu Sep 18 01:54:12 2003 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sep 18, 2003 1:54:12 PM Subject: Shutdown matrix 2003-09-18 13:54:07: Report Shutdown for matrix Message-ID: 1 wafer slipped off load arm fell down into machine From cbaxter at snf.stanford.edu Thu Sep 18 05:20:39 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 18, 2003 5:20:39 PM Subject: Shutdown matrix 2003-09-18 13:54:07: Report Clear for matrix Message-ID: recovered stuck wafer and re-installed one of the ceramic that came off