Problem matrix 2004-04-10 21:07:13: FROZEN, WILL NOT RESPOND TO COMMANDS

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 12 09:47:17 PDT 2004

Previous message: Problem matrix 2004-04-10 21:07:13: FROZEN, WILL NOT RESPOND TO COMMANDS
Next message: Problem matrix 2004-04-22 02:38:10: "Power down machine and retrieve wafer" message shown.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Lost wafer.  Found one of the ceramic pins came out.  Replaced the pin, wiped down the chamber and ran several test wafers with no problems.

Previous message: Problem matrix 2004-04-10 21:07:13: FROZEN, WILL NOT RESPOND TO COMMANDS
Next message: Problem matrix 2004-04-22 02:38:10: "Power down machine and retrieve wafer" message shown.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the matrix-pcs mailing list