Problem matrix 2004-04-22 02:38:10: "Power down machine and retrieve wafer" message shown.
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Apr 22 11:40:06 PDT 2004
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Problem matrix 2004-04-22 02:38:10: "Power down machine and retrieve wafer" message shown.
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Shutdown matrix 2004-04-23 14:50:32: The puck is sticking out
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reset the system
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Problem matrix 2004-04-22 02:38:10: "Power down machine and retrieve wafer" message shown.
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Shutdown matrix 2004-04-23 14:50:32: The puck is sticking out
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