Shutdown matrix 2004-04-27 13:13:26: Pump down failure
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Apr 27 16:14:09 PDT 2004
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Shutdown matrix 2004-04-27 13:13:26: Pump down failure
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Ran 8 wafers with no problem
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Shutdown matrix 2004-04-27 13:13:26: Pump down failure
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