From yeh at snf.stanford.edu Tue Aug 3 19:23:14 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Tue, 3 Aug 2004 19:23:14 -0700 Subject: Shutdown matrix SNF 2004-08-03 19:23:14: contaminated Message-ID: Sorry all! just etched a sample which may have Au on it. From cbaxter at snf.stanford.edu Tue Aug 3 19:37:06 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Aug 2004 19:37:06 -0700 Subject: Shutdown matrix SNF 2004-08-03 19:23:14: contaminated Message-ID: ran a long o2 clean From eenriquez at snf.stanford.edu Wed Aug 4 15:55:47 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Aug 2004 15:55:47 -0700 Subject: Comment matrix SNF 2004-08-04 15:55:46: Wet cleaned chamber Message-ID: Wet cleaned chamber after wafer containing gold was processed through the system. From crichter at snf.stanford.edu Thu Aug 5 11:37:28 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 5 Aug 2004 11:37:28 -0700 Subject: Problem matrix SNF 2004-08-05 11:37:27: 'Unexpected wafer on pic' message Message-ID: wafer stuck in matrix From crichter at snf.stanford.edu Thu Aug 5 11:38:57 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 5 Aug 2004 11:38:57 -0700 Subject: Shutdown matrix SNF 2004-08-05 11:38:56: wafer stuck inside matrix Message-ID: From eenriquez at snf.stanford.edu Thu Aug 5 13:44:30 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Aug 2004 13:44:30 -0700 Subject: Shutdown matrix SNF 2004-08-05 11:38:56: wafer stuck inside matrix Message-ID: Removed stuck wafer. Cycled 20 wafers through the system with no problems. From eenriquez at snf.stanford.edu Thu Aug 5 13:44:46 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Aug 2004 13:44:46 -0700 Subject: Problem matrix SNF 2004-08-05 11:37:27: 'Unexpected wafer on pic' message Message-ID: Removed stuck wafer. From qwang at snf.stanford.edu Tue Aug 17 11:51:52 2004 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Tue, 17 Aug 2004 11:51:52 -0700 Subject: Problem matrix SNF 2004-08-17 11:51:32: the standby condition can not be switched to etching mode Message-ID: From eenriquez at snf.stanford.edu Tue Aug 17 14:07:21 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 Aug 2004 14:07:21 -0700 Subject: Problem matrix SNF 2004-08-17 11:51:32: the standby condition can not be switched to etching mode Message-ID: No problem found. Pushed the "exit standby" button and the system came out of standby. From alissa at snf.stanford.edu Sat Aug 21 12:59:32 2004 From: alissa at snf.stanford.edu (alissa at snf.stanford.edu) Date: Sat, 21 Aug 2004 12:59:32 -0700 Subject: Problem matrix SNF 2004-08-21 12:59:31: will not exit standbymode Message-ID: Matrix would not exit standby mode. Found machine with cassette not in home position. From eenriquez at snf.stanford.edu Mon Aug 23 07:25:11 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Aug 2004 07:25:11 -0700 Subject: Problem matrix SNF 2004-08-21 12:59:31: will not exit standbymode Message-ID: Increased vent pressure to 25 psi. From eenriquez at snf.stanford.edu Mon Aug 23 07:25:27 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Aug 2004 07:25:27 -0700 Subject: Comment matrix SNF 2004-08-04 15:55:46: Wet cleaned chamber Message-ID: ok From beckwith at snf.stanford.edu Mon Aug 23 13:58:24 2004 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Mon, 23 Aug 2004 13:58:24 -0700 Subject: Problem matrix SNF 2004-08-23 13:58:24: sys. ON/OFF light off; ran anyway, must be Message-ID: the bulb. From cbaxter at snf.stanford.edu Mon Aug 23 18:11:52 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 23 Aug 2004 18:11:52 -0700 Subject: Problem matrix SNF 2004-08-23 13:58:24: sys. ON/OFF light off; ran anyway, must be Message-ID: installed two new light bulb. From eenriquez at snf.stanford.edu Thu Aug 26 11:07:57 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Aug 2004 11:07:57 -0700 Subject: Shutdown matrix SNF 2004-08-26 11:07:57: Blown fuse on DC power supply Message-ID: From eenriquez at snf.stanford.edu Thu Aug 26 14:38:22 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Aug 2004 14:38:22 -0700 Subject: Shutdown matrix SNF 2004-08-26 11:07:57: Blown fuse on DC power supply Message-ID: Replaced bad cooling fan. From crichter at snf.stanford.edu Sun Aug 29 11:51:11 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sun, 29 Aug 2004 11:51:11 -0700 Subject: Problem matrix SNF 2004-08-29 11:51:10: software crash Message-ID: The system does not get out of standby after pressing EXIT several times