From altug at snf.stanford.edu Mon Dec 6 18:47:01 2004 From: altug at snf.stanford.edu (altug at snf.stanford.edu) Date: Mon, 6 Dec 2004 18:47:01 -0800 Subject: Problem matrix SNF 2004-12-06 18:47:01: Gives Error Message-ID: Terminates due to "matching" problem From eenriquez at snf.stanford.edu Tue Dec 7 09:24:44 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Dec 2004 09:24:44 -0800 Subject: Problem matrix SNF 2004-12-06 18:47:01: Gives Error Message-ID: ran 6 wafers, no problems found From korgan at snf.stanford.edu Fri Dec 10 07:53:15 2004 From: korgan at snf.stanford.edu (korgan at snf.stanford.edu) Date: Fri, 10 Dec 2004 07:53:15 -0800 Subject: Problem matrix SNF 2004-12-10 07:53:15: Process Terminating Message-ID: About 5 seconds into the etch process the Matrix stops, sais, "process terminated", and puts the wafer back back in the cassette. From eenriquez at snf.stanford.edu Fri Dec 10 08:42:22 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Dec 2004 08:42:22 -0800 Subject: Problem matrix SNF 2004-12-10 07:53:15: Process Terminating Message-ID: Turned on RF generator From ericp at snf.stanford.edu Sun Dec 12 20:49:25 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 12 Dec 2004 20:49:25 -0800 Subject: Problem matrix SNF 2004-12-12 20:49:24: matching error Message-ID: Won't strike plasma. From eenriquez at snf.stanford.edu Mon Dec 13 07:50:16 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Dec 2004 07:50:16 -0800 Subject: Problem matrix SNF 2004-12-12 20:49:24: matching error Message-ID: Turned on RF generator breaker. Looks like it has a bad circuit breaker. It intermittently looses connection ( not tripped or turned off). Will need to replace the breaker but its runnable for now.