From qchen at snf.stanford.edu Tue Feb 3 14:21:45 2004 From: qchen at snf.stanford.edu (qchen at snf.stanford.edu) Date: Tue, 3 Feb 2004 14:21:45 -0800 Subject: Shutdown matrix 2004-02-03 14:21:45: matrix stop Message-ID: when i was running photoresist cleaning after etching on matrix. the machine was down suddently. It may need a reset. From cbaxter at snf.stanford.edu Tue Feb 3 17:11:49 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Feb 2004 17:11:49 -0800 Subject: Shutdown matrix 2004-02-03 14:21:45: matrix stop Message-ID: reset system From bwacker at snf.stanford.edu Fri Feb 6 13:46:40 2004 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Fri, 6 Feb 2004 13:46:40 -0800 Subject: Problem matrix 2004-02-06 13:46:37: Loading card is damaged Message-ID: The loading card laminated top is partially peeled off and the card is difficult to load. From cbaxter at snf.stanford.edu Fri Feb 6 16:18:32 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Feb 2004 16:18:32 -0800 Subject: Problem matrix 2004-02-06 13:46:37: Loading card is damaged Message-ID: remove plastic laminate From daesung at snf.stanford.edu Wed Feb 11 09:31:44 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Wed, 11 Feb 2004 09:31:44 -0800 Subject: Problem matrix 2004-02-11 09:31:43: Pump down failure Message-ID: From gladys at snf.stanford.edu Wed Feb 11 11:53:45 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Wed, 11 Feb 2004 11:53:45 -0800 Subject: Problem matrix 2004-02-11 09:31:43: Pump down failure Message-ID: fixed From jnee at snf.stanford.edu Fri Feb 13 16:22:20 2004 From: jnee at snf.stanford.edu (jnee at snf.stanford.edu) Date: Fri, 13 Feb 2004 16:22:20 -0800 Subject: Shutdown matrix 2004-02-13 16:22:19: EXTEND ARM FAULT Message-ID: First wafer I tried to run, got TRANSPORT EXTEND ARM FAULT when it tried to pick up wafer to go in. It only got a little ways before being stuck - wafer is still partly outside (not far from cassette). The screen had a "RESTART" shown, pressed and was able to remove wafer as vacuum went off. The system is in initialization, but stuck on initializing WAFER TRANSPORT line. Been like that for about 5 minutes (now is 4:20pm). From cbaxter at snf.stanford.edu Fri Feb 13 19:18:22 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 13 Feb 2004 19:18:22 -0800 Subject: Shutdown matrix 2004-02-13 16:22:19: EXTEND ARM FAULT Message-ID: intialize robot arm From lindaw at snf.stanford.edu Sun Feb 15 06:49:43 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 15 Feb 2004 06:49:43 -0800 Subject: Problem matrix 2004-02-15 06:49:42: step 1 error "termination pump error" Message-ID: pump not on? From gyama at snf.stanford.edu Mon Feb 16 16:30:18 2004 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 16 Feb 2004 16:30:18 -0800 Subject: Problem matrix 2004-02-16 16:30:18: not stripping Message-ID: From lindaw at snf.stanford.edu Tue Feb 17 11:11:53 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 17 Feb 2004 11:11:53 -0800 Subject: Shutdown matrix 2004-02-17 11:11:52: stand by chamber pressure 6008mT Message-ID: Got pump error on the weekend, and gary reports no etching. When I got the pump error in step 1, it just unloaded the test wafer without running through O2. From mcvittie at snf.stanford.edu Tue Feb 17 18:25:37 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 17 Feb 2004 18:25:37 -0800 Subject: Problem matrix 2004-02-17 18:25:37: Matrix Pump has problem Message-ID: Connected vacuum gauge to pump line. Vacuum only gets down 3.7 torr. Oil level on pump looks low. Jim From mcvittie at snf.stanford.edu Wed Feb 18 10:22:07 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 18 Feb 2004 10:22:07 -0800 Subject: Problem matrix 2004-02-15 06:49:42: step 1 error "termination pump error" Message-ID: Added oil From mcvittie at snf.stanford.edu Wed Feb 18 10:22:25 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 18 Feb 2004 10:22:25 -0800 Subject: Problem matrix 2004-02-16 16:30:18: not stripping Message-ID: From mcvittie at snf.stanford.edu Wed Feb 18 10:22:42 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 18 Feb 2004 10:22:42 -0800 Subject: Shutdown matrix 2004-02-17 11:11:52: stand by chamber pressure 6008mT Message-ID: From mcvittie at snf.stanford.edu Wed Feb 18 10:22:58 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 18 Feb 2004 10:22:58 -0800 Subject: Problem matrix 2004-02-17 18:25:37: Matrix Pump has problem Message-ID: From harshal at snf.stanford.edu Wed Feb 18 16:50:37 2004 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Wed, 18 Feb 2004 16:50:37 -0800 Subject: Problem matrix 2004-02-18 16:50:36: lock pump down not achieved. Message-ID: wafer loaded but etch not possible. From rcrane at snf.stanford.edu Wed Feb 18 17:51:58 2004 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Wed, 18 Feb 2004 17:51:58 -0800 Subject: Shutdown matrix 2004-02-18 17:51:57: vac pump will not base out Message-ID: Pump needs to be changed From eenriquez at snf.stanford.edu Thu Feb 19 08:11:32 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Feb 2004 08:11:32 -0800 Subject: Problem matrix 2004-02-18 16:50:36: lock pump down not achieved. Message-ID: From eenriquez at snf.stanford.edu Thu Feb 19 08:12:41 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Feb 2004 08:12:41 -0800 Subject: Shutdown matrix 2004-02-18 17:51:57: vac pump will not base out Message-ID: Testing the pump From eenriquez at snf.stanford.edu Thu Feb 19 09:06:08 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Feb 2004 09:06:08 -0800 Subject: Comment matrix 2004-02-19 09:06:07: Pump down problem Message-ID: Added oil to the pump. Level is now about half way on the sight glass. I've marked the sight glass to monitor the oil level. Ran 8 wafers on the tool with no problems. From harshal at snf.stanford.edu Thu Feb 19 14:56:11 2004 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Thu, 19 Feb 2004 14:56:11 -0800 Subject: Problem matrix 2004-02-19 14:56:10: transport initailisation failed. Message-ID: From vossough at snf.stanford.edu Thu Feb 19 19:22:39 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Thu, 19 Feb 2004 19:22:39 -0800 Subject: Shutdown matrix 2004-02-19 19:22:38: wafer transform "initiallizing", needs reset ? Message-ID: From eenriquez at snf.stanford.edu Fri Feb 20 07:11:34 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Feb 2004 07:11:34 -0800 Subject: Comment matrix 2004-02-19 09:06:07: Pump down problem Message-ID: From eenriquez at snf.stanford.edu Fri Feb 20 07:16:37 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Feb 2004 07:16:37 -0800 Subject: Problem matrix 2004-02-19 14:56:10: transport initailisation failed. Message-ID: Checking problem. From eenriquez at snf.stanford.edu Fri Feb 20 07:17:10 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Feb 2004 07:17:10 -0800 Subject: Shutdown matrix 2004-02-19 19:22:38: wafer transform "initiallizing", needs reset ? Message-ID: Checking problem From eenriquez at snf.stanford.edu Fri Feb 20 07:57:47 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Feb 2004 07:57:47 -0800 Subject: Comment matrix 2004-02-20 07:57:46: Message-ID: Tie wrapped loose vacuum line and rebooted the tool. From eenriquez at snf.stanford.edu Fri Feb 20 09:21:50 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Feb 2004 09:21:50 -0800 Subject: Comment matrix 2004-02-20 07:57:46: Message-ID: From daesung at snf.stanford.edu Sat Feb 21 09:29:11 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Sat, 21 Feb 2004 09:29:11 -0800 Subject: Problem matrix 2004-02-21 09:29:10: Wafer transport error Message-ID: From eenriquez at snf.stanford.edu Mon Feb 23 09:08:01 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Feb 2004 09:08:01 -0800 Subject: Problem matrix 2004-02-21 09:29:10: Wafer transport error Message-ID: Reset system, cycled 6 wafers. No problem From daesung at snf.stanford.edu Tue Feb 24 15:52:38 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Tue, 24 Feb 2004 15:52:38 -0800 Subject: Problem matrix 2004-02-24 15:52:37: Wafer transport error Message-ID: After the wafer transport error, the screen shows the wafer transport initializing status. But it would not go back to a normal status. From hanjun at snf.stanford.edu Tue Feb 24 16:45:27 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Tue, 24 Feb 2004 16:45:27 -0800 Subject: Problem matrix 2004-02-24 16:45:27: Program got stuck at the transport intializing step Message-ID: as stated in the title... From bwacker at snf.stanford.edu Tue Feb 24 17:13:30 2004 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Tue, 24 Feb 2004 17:13:30 -0800 Subject: Shutdown matrix 2004-02-24 17:13:30: MATRIX IS IN INTIALIZING STATE, WILL NOT START Message-ID: From eenriquez at snf.stanford.edu Wed Feb 25 07:27:57 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Feb 2004 07:27:57 -0800 Subject: Problem matrix 2004-02-24 15:52:37: Wafer transport error Message-ID: working on the problem From eenriquez at snf.stanford.edu Wed Feb 25 07:28:09 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Feb 2004 07:28:09 -0800 Subject: Problem matrix 2004-02-24 16:45:27: Program got stuck at the transport intializing step Message-ID: working on the problem. From eenriquez at snf.stanford.edu Wed Feb 25 07:28:20 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Feb 2004 07:28:20 -0800 Subject: Shutdown matrix 2004-02-24 17:13:30: MATRIX IS IN INTIALIZING STATE, WILL NOT START Message-ID: working on the problem From eenriquez at snf.stanford.edu Wed Feb 25 09:35:20 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Feb 2004 09:35:20 -0800 Subject: Comment matrix 2004-02-25 09:35:20: Message-ID: Adjusted the robot retract postion flag. Ran 8 wafers with no problem. From daesung at snf.stanford.edu Thu Feb 26 02:36:52 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Thu, 26 Feb 2004 02:36:52 -0800 Subject: Shutdown matrix 2004-02-26 02:36:51: Wafer transport error Message-ID: From eenriquez at snf.stanford.edu Thu Feb 26 07:08:48 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Feb 2004 07:08:48 -0800 Subject: Comment matrix 2004-02-25 09:35:20: Message-ID: From eenriquez at snf.stanford.edu Thu Feb 26 07:11:01 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Feb 2004 07:11:01 -0800 Subject: Shutdown matrix 2004-02-26 02:36:51: Wafer transport error Message-ID: Working on problem. From eenriquez at snf.stanford.edu Thu Feb 26 09:12:40 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Feb 2004 09:12:40 -0800 Subject: Comment matrix 2004-02-26 09:12:39: Robot initialization problem Message-ID: I have not been able to duplicate this problem. Next time it occurs please document in detail what happened (condition of the machine, which buttons were pressed, alarms...) From daesung at snf.stanford.edu Thu Feb 26 15:25:55 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Thu, 26 Feb 2004 15:25:55 -0800 Subject: Shutdown matrix 2004-02-26 15:25:53: Wafer transport error Message-ID: Pump down status, This problem occurs so often, almost every day. From cbaxter at snf.stanford.edu Thu Feb 26 17:29:24 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 26 Feb 2004 17:29:24 -0800 Subject: Comment matrix 2004-02-26 09:12:39: Robot initialization problem Message-ID: From cbaxter at snf.stanford.edu Thu Feb 26 17:30:11 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 26 Feb 2004 17:30:11 -0800 Subject: Shutdown matrix 2004-02-26 15:25:53: Wafer transport error Message-ID: intialize robot and re-teach center position