From eenriquez at snf.stanford.edu Tue Jun 1 08:36:49 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Jun 2004 08:36:49 -0700 Subject: Problem matrix 2004-05-29 15:11:47: pumpdown failure Message-ID: The door o-ring pulled out slightly out of its groove. Cleaned and reinstalled the o-ring. cycled 10 x with no problems. From eenriquez at snf.stanford.edu Tue Jun 1 08:37:35 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Jun 2004 08:37:35 -0700 Subject: Shutdown matrix 2004-05-29 15:11:54: Message-ID: The door o-ring pulled out slightly out of its groove. Cleaned and reinstalled the o-ring. cycled 10 x with no problems. From ycfu at snf.stanford.edu Tue Jun 8 11:54:40 2004 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: Tue, 8 Jun 2004 11:54:40 -0700 Subject: Shutdown matrix 2004-06-08 11:54:39: pump does not work Message-ID: From eenriquez at snf.stanford.edu Tue Jun 8 12:18:51 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jun 2004 12:18:51 -0700 Subject: Shutdown matrix 2004-06-08 11:54:39: pump does not work Message-ID: vacuum pump breaker tripped. Added oil, reset breaker and ran test. From hanjun at snf.stanford.edu Sat Jun 19 19:37:46 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Sat, 19 Jun 2004 19:37:46 -0700 Subject: Shutdown matrix 2004-06-19 19:37:46: wafer handler is stuck... Message-ID: .. with a message of "door not closed". It happened when the wafer was brought into the chamber. From eenriquez at snf.stanford.edu Mon Jun 21 14:27:00 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Jun 2004 14:27:00 -0700 Subject: Shutdown matrix 2004-06-19 19:37:46: wafer handler is stuck... Message-ID: Reset system. Replaced pump exhaust demister filter. From hanjun at snf.stanford.edu Tue Jun 22 22:25:48 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Tue, 22 Jun 2004 22:25:48 -0700 Subject: Problem matrix SNF 2004-06-22 22:25:47: doesn't pump down... Message-ID: From eenriquez at snf.stanford.edu Wed Jun 23 15:41:37 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jun 2004 15:41:37 -0700 Subject: Problem matrix SNF 2004-06-22 22:25:47: doesn't pump down... Message-ID: The pump was off and had lost most of its oil up the exhaust. Found the vacuum valve bellows had a huge leak. Borrowed a valve from the P-5000 in the basement and replaced the valve. The old valve was (air to open air to close) the new valve is (air to open - spring to close). Ran wafers with no problems. From wtpark at snf.stanford.edu Mon Jun 28 00:32:17 2004 From: wtpark at snf.stanford.edu (wtpark at snf.stanford.edu) Date: Mon, 28 Jun 2004 00:32:17 -0700 Subject: Shutdown matrix SNF 2004-06-28 00:32:16: power problem Message-ID: The machine said "dropped wafer, need to reset power to retreive wafer" I was able to retreive the wafer but when I turned the power off and back on, the screen died. From eenriquez at snf.stanford.edu Mon Jun 28 07:53:51 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Jun 2004 07:53:51 -0700 Subject: Shutdown matrix SNF 2004-06-28 00:32:16: power problem Message-ID: turned machine. From tkramer at snf.stanford.edu Tue Jun 29 16:50:02 2004 From: tkramer at snf.stanford.edu (tkramer at snf.stanford.edu) Date: Tue, 29 Jun 2004 16:50:02 -0700 Subject: Problem matrix SNF 2004-06-29 16:50:02: display is off Message-ID: Cannot see anything on display. Perhaps something is turned off. Was like this when I walked up. From cbaxter at snf.stanford.edu Tue Jun 29 17:22:30 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 Jun 2004 17:22:30 -0700 Subject: Problem matrix SNF 2004-06-29 16:50:02: display is off Message-ID: reboot system