From mbadi at snf.stanford.edu Sat Mar 6 01:18:50 2004 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Sat, 6 Mar 2004 01:18:50 -0800 Subject: Problem matrix 2004-03-06 01:18:49: System in undefined state Message-ID: had a casette of 23 wafers; did 22 of them, stalled on the last one while loading. wafer never went into the system but instead sat on the wand without a vacuum. Screen now reads "Power Down." From eenriquez at snf.stanford.edu Mon Mar 8 08:04:12 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Mar 2004 08:04:12 -0800 Subject: Problem matrix 2004-03-06 01:18:49: System in undefined state Message-ID: System was in the standby state. Cycled 6 wafers with no problems. From yiching at snf.stanford.edu Mon Mar 8 18:52:22 2004 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Mon, 8 Mar 2004 18:52:22 -0800 Subject: Problem matrix 2004-03-08 18:52:21: pumpdown failure Message-ID: in step one of standard program occurs >50% of the times From eenriquez at snf.stanford.edu Tue Mar 9 08:32:20 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Mar 2004 08:32:20 -0800 Subject: Problem matrix 2004-03-08 18:52:21: pumpdown failure Message-ID: Cleaned door oring. Ran 8 wafers with no problem. Noticed that the chamber leak rate is a little high, but I don't know if its normal for this system. If it fails for pumpdown, try to restart. If it fails a second time, please put the system down. From yiching at snf.stanford.edu Tue Mar 9 12:53:28 2004 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Tue, 9 Mar 2004 12:53:28 -0800 Subject: Shutdown matrix 2004-03-09 12:53:27: still getting pumpdown failure Message-ID: From eenriquez at snf.stanford.edu Tue Mar 9 15:35:00 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Mar 2004 15:35:00 -0800 Subject: Shutdown matrix 2004-03-09 12:53:27: still getting pumpdown failure Message-ID: Replaced gas inlet o-ring. Pumps a little faster now. Pressure crosser over in about 7-8 seconds. From hanjun at snf.stanford.edu Thu Mar 18 13:02:55 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Thu, 18 Mar 2004 13:02:55 -0800 Subject: Problem matrix 2004-03-18 13:02:54: found stuck at the "initializing" stage.. Message-ID: From eenriquez at snf.stanford.edu Thu Mar 18 15:14:41 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Mar 2004 15:14:41 -0800 Subject: Problem matrix 2004-03-18 13:02:54: found stuck at the "initializing" stage.. Message-ID: Reset system and cycled wafers. From hanjun at snf.stanford.edu Mon Mar 22 13:44:27 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Mon, 22 Mar 2004 13:44:27 -0800 Subject: Shutdown matrix 2004-03-22 13:44:26: wafer inside the chamber Message-ID: I mistakenly removed the cassette around the time when the chuck delivered the wafer, ending it up locked with the wafer inside... Sorry about the trouble..! From eenriquez at snf.stanford.edu Mon Mar 22 15:04:48 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Mar 2004 15:04:48 -0800 Subject: Shutdown matrix 2004-03-22 13:44:26: wafer inside the chamber Message-ID: Removed the wafer from the robot and placed in cassette. From yue at snf.stanford.edu Tue Mar 23 21:00:22 2004 From: yue at snf.stanford.edu (yue at snf.stanford.edu) Date: Tue, 23 Mar 2004 21:00:22 -0800 Subject: Problem matrix 2004-03-23 21:00:22: Message-ID: screen went black during the auto run. From cbaxter at snf.stanford.edu Tue Mar 23 22:00:43 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 23 Mar 2004 22:00:43 -0800 Subject: Problem matrix 2004-03-23 21:00:22: Message-ID: re-boot system and unload wafer from chamber. From phimmer at snf.stanford.edu Sun Mar 28 18:44:24 2004 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: Sun, 28 Mar 2004 18:44:24 -0800 Subject: Shutdown matrix 2004-03-28 18:44:23: pumpdown terminated Message-ID: fails on step1 to ?reach base pressure. terminates program and unloaded dummy wafer. From cbaxter at snf.stanford.edu Tue Mar 30 21:05:41 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 30 Mar 2004 21:05:41 -0800 Subject: Shutdown matrix 2004-03-28 18:44:23: pumpdown terminated Message-ID: pump was low on fomblin oil. added 6/06 fomblin oil